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DESCRIPTION Honeywell ZephyrTM Digital Airflow Sensors: HAF Series-High Accuracy, provide a digital interface for reading airflow over the specified full scale flow span and temperature range. Their thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. They are available in standard flow ranges and are fully calibrated and temperature compensated with an on-board Application Specific Integrated Circuit (ASIC). The HAF Series is compensated over the temperature range of 0 C to 50 C [32 F to 122 F] and operates across a temperature range of -20 C to 70 C [-4 F to 158 F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and calculated airflow channel to provide repeatable flow response. Zephyr sensors provide customers with enhanced reliability, digital accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.
High 2.5% accuracy allows for very precise airflow
FEATURES AND BENEFITS (= competitive differentiator) High 12-bit resolution increases ability to sense small airflow changes, allowing customers to more precisely control their application Low 3.3 Vdc operating voltage option and low power consumption allow for use in battery-driven and other portable applications ASIC-based I2C digital output compatibility eases integration to microprocessors or microcontrollers, reducing PCB complexity and component count Bidirectional flow sensing capability eliminates the need for two airflow sensors, helping to reduce production costs and implementation time Insensitivity to mounting orientation allows customer to position sensor in most optimal point in the system, eliminating concern for positional effects Insensitivity to altitude eliminates customer-implemented altitude adjustments in the system, easing integration and reducing production costs by not having to purchase additional sensors for altitude adjustments Small size occupies less space on PCB, allowing easier fit and potentially reducing production costs; PCB size may also be reduced for easier fit into space-constrained applications RoHS-compliant materials meet Directive 2002/95/EC
measurement, often ideal for demanding applications with high accuracy requirements Full calibration and temperature compensation typically allow customer to remove additional components associated with signal conditioning from the PCB, reducing PCB size as well as costs often associated with those components (e.g., acquisition, inventory, assembly) Customizable for specific end-user needs High sensitivity at very low flows allows a customer's application to detect presence or absence of airflow High stability reduces errors due to thermal effects and null shift to provide accurate readings over time, often eliminating need for system calibration after PCB mount and periodically over time Low pressure drop typically improves patient comfort in medical applications, and reduces noise and system wear on other components such as motors and pumps Linear output provides more intuitive sensor signal than the raw output of basic airflow sensors, which can help reduce production costs, design, and implementation time Fast response time allows a customer's application to respond quickly to airflow change, important in critical medical (i.e., anesthesia) and industrial (i.e., fume hood) applications
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POTENTIAL APPLICATIONS Medical Anesthesia delivery machines Ventricular assist devices (heart pumps) Hospital diagnostics (spectrometry, gas chromatography) Nebulizers Oxygen concentrators Patient monitoring systems (respiratory monitoring) Sleep apnea machines Spirometers Ventilators Industrial Air-to-fuel ratio Analytical instrumentation (spectrometry, chromatography) Fuel cells Gas leak detection Gas meters HVAC filters VAV system on HVAC systems Meteorolgy
Table 1: Absolute Maximum Ratings1 Characteristic Parameter Supply voltage -0.3 Vdc to 6.0 Vdc Voltage on output pin -0.3 V to Vsupply Storage temperature range -40 C to 125 C [-40 F to 257 F] Maximum flow change 5.0 SLPM/s Maximum common mode pressure 25 psi at 25 C [77 F] Maximum flow 10 SLPM
CAUTION
IMPROPER USE Do not use these products to sense liquid or fluid flow. Failure to comply with these instructions may result in product damage.
Note 1: Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings.
Table 2: Operating Characteristics Characteristic Supply voltage Supply current Power: 3.3 Vdc 5.0 Vdc Operating temperature range Compensated temperature range Accuracy: forward flow reverse flow Total error band: forward flow: reverse flow: Null accuracy Response time Resolution Start up time Warm up time Calibration media Bus standards Null stability Reverse polarity protection
Parameter 3.3 Vdc 10%; 5.0 Vdc 10% 16 mA max. 23 mW typ. 38 mW typ. -20 C to 70 C [-4 F to 158 F] 0 C to 50 C [32 F to 122 F] 0.25% FSS or 2.5% of reading, whichever is greater 0.25% FSS or 9% of reading, whichever is greater
Note
1 2, 4
3, 4 0.25% FSS or 4.5% of reading, whichever is greater 0.25% FSS or 9% of reading, whichever is greater 0.02% FSS 1 ms typ. 12 bit min. 17 ms 30 ms gaseous nitrogen I2C, fast mode (400 kHz) 0.01% FSS maximum deviation from null output after 1000 hours at 25 C no
4, 10 5 6 7 8 9
Notes: 1. Custom and extended compensated temperature ranges are possible. Contact Honeywell for details. 2. Accuracy is the maximum deviation from the nominal digital output over the compensated flow range at a reference temperature of 25 C. Errors include offset, span, non-linearity, hysteresis and non-repeatability (see Figure 3 for the Accuracy Error Band vs Flow). 3. Total error band includes all errors over the compensated flow range including all effects due to temperature over the compensated temperature range (see Figure 4 for the Total Error Band). 4. Full Scale Span (FSS) is the algebraic difference between the digital output at the forward Full Scale (FS) flow and the digital output at the reverse FS flow. Forward flow is defined as flow from P1 to P2 as shown in Figure 4. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 C and atmospheric pressure 760 (101.3 kPa). 5. Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic interface). 6. Start-up time: time to first valid reading of serial number proceeding streaming 14-bit flow measurements. 7. Warm-up time: time to the first valid flow measurement after power is applied. 8. Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options. 9. Refer to Honeywell Technical Note for I2C protocol information. 10. Null accuracy is the maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset errors, thermal airflow hysteresis and repeatability errors. 2 www.honeywell.com/sensing
Table 3. Environmental Characteristics Characteristic Humidity Shock Vibration ESD Radiated immunity Table 4. Wetted Materials Characteristic Covers Substrate Adhesives Electronic components Compliance Parameter high temperature polymer PCB epoxy silicon, gold RoHS, WEEE Parameter 0% to 95% RH, non-condensing 100 g, 11 ms 15 g at 20 Hz to 2000 Hz Class 3B per MIL-STD 883G Level 3 from (80 MHz to 1000 MHz) per spec IEC61000-4-3
Table 5. Recommended Mounting and Implementation Characteristic Parameter Mounting screw size 5-40 Mounting screw torque 0.68 N m [6 in-lb] Tubing for long port style 70 durometer, size 0.125 inch inside diameter, 0.250 inch outside diameter silicone tubing O-ring for short port style AS568A, Size 7, Silicone, Shore A 70 O-ring for long port style AS568A, Size 10, Silicone, Shore A 70 Filter recommendation 5-micron filter upstream of the sensor Figure 1. Nomenclature and Order Guide
CAUTION
LARGE PARTICULATE DAMAGE Use a 5-micron filter upstream of the sensor to keep media flow through the sensor free of condensing moisture and particulates. Large, high-velocity particles or conductive particles may damage the sensing element. Failure to comply with these instructions may result in product damage.
Example Catalog Listing HAFBLS0200C2AX5 = High accuracy airflow sensor, bidirectional forward flow optimized, long port style, snap mount housing, 200 SCCM, digital I2C output with 0X29 address, 10% to 90% transfer function, 5.0 Vdc supply voltage. Customer-specific Requirements Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.
Note: 1. The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration.
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TM
Figure 2. Nominal Digital Output Ideal Transfer Function Digital Output Code = 16383 * [0.5 + 0.4 * (Flow Applied/Full Scale Flow)] Flow Applied = Full Scale Flow * [(Digital Output Code/16383) - 0.5]/0.4
Figure 3. Accuracy Error Band
Figure 4. Total Error Band
Figure 5. Long Port Style Flow vs Pressure Flow (SCCM) -200 -150 -100 -50 0 50 100 150 200 Figure 6. Short Port Style Flow vs Pressure Flow (SCCM) -200 -150 -100 -50 0 50 100 150 200 Pressure Drop (inches H2O) -0.470 -0.284 -0.143 -0.045 0.000 0.048 0.139 0.287 0.452 Pressure Drop (inches H2O) -0.019 -0.013 -0.007 -0.001 0.000 0.005 0.010 0.016 0.022
4
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Figure 7. Wave Solder Profile
300
Temperature (C)
250 200 150 100 50 0 0 20
Max. temp. = 243 C Max. temp. = 205 C Housing temp. (top of device) Pin temp. (bottom of device)
40 60 Time (s)
80
100
Figure 8. Mounting Dimensions (For reference only: mm [in]). Additional port and housing styles available. Long Port Style, Fastener Mount Short Port Style, Snap Mount
22,00 [0.87]
MODEL NUMBER LOT CODE
DIA. 2,30 [0.09]
MODEL NUMBER LOT CODE
TERMINAL SIDE 3,0 [0.12] 2,00 TYP. [0.079] 1 23 4 1,00 [0.04] 7,20 [0.28] 3,50 [0.14] 10,3 [0.40]
2,00 TYP. [0.079]
1234
TERMINAL SIDE 26,00 [1.02] 3,3 [0.13] 1,00 [0.04]
6,50 [0.26]
10,40 [0.41] 7,20 [0.28]
4,60 [0.18] 3,00 [0.12] 12,8 [0.50]
4,80 [0.19] 1,80 [0.071] 10,3 [0.40] 2,50 [0.10] 4X DIA. 0,812 [0.032] 22,0 [0.866]
10,00 [0.39] 2X DIA. 5,35 [0.21] 7,20 [0.28] 6,50 [0.26] 19,90 [0.78] 18,00 [0.71] 36,00 [1.42]
2X DIA. 2,2 [0.086] THRU HOLES FOR MOUNTING 3,80 [0.150] 0,65 [0.026]
1 2 3 4
2X DIA. 3,40 [0.13] 6,35 [0.25] 12,70 [0.50] 36,00 [1.42] 28,80 [1.13] 4X DIA. 0,812 [0.032] 2X PORTS
1
2
3
4
7,20 [0.28]
19,90 [0.78]
4,00 [0.157]
2X 7,20 [0.28]
2X DIA. 3,40 [0.134] SENSOR FOOTPRINT VIEWED FROM TERMINAL SIDE
6,35 [0.25]
12,70 [0.50]
2X 2,50 [0.098] 28,80 [1.13] 2X PORTS 26,00 [1.024] SENSOR FOOTPRINT VIEWED FROM TERMINAL SIDE
AIRFLOW DIRECTION, PORT SIDE
AIRFLOW DIRECTION, PORT SIDE
Pinout (digital function)
1 = SCL
2 = Vsupply
3 = ground
4 = SDA
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WARNING
PERSONAL INJURY DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. WARRANTY/REMEDY Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. Honeywell s standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer s sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages. While we provide application assistance personally, through our literature and the Honeywell web site, it is up to the customer to determine the suitability of the product in the application. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this printing. However, we assume no responsibility for its use.
WARNING
MISUSE OF DOCUMENTATION The information presented in this product sheet is for reference only. Do not use this document as a product installation guide. Complete installation, operation, and maintenance information is provided in the instructions supplied with each product. Failure to comply with these instructions could result in death or serious injury. SALES AND SERVICE Honeywell serves its customers through a worldwide network of sales offices, representatives and distributors. For application assistance, current specifications, pricing or name of the nearest Authorized Distributor, contact your local sales office or: E-mail: info.sc@honeywell.com Internet: www.honeywell.com/sensing Phone and Fax:
Asia Pacific Europe Latin America USA/Canada +65 6355-2828 +65 6445-3033 Fax +44 (0) 1698 481481 +44 (0) 1698 481676 Fax +1-305-805-8188 +1-305-883-8257 Fax +1-800-537-6945 +1-815-235-6847 +1-815-235-6545 Fax
Sensing and Control Honeywell 1985 Douglas Drive North Golden Valley, MN 55422 www.honeywell.com
008178-3-EN IL50 GLO Printed in USA May 2010 2010 Honeywell International Inc. All rights reserved.

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